MKS Instruments

Newport Spectra-Physics GmbH


MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor, and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.


Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control technology, ozone generation and delivery, RF & DC power, reactive gas generation, vacuum technology, lasers, photonics, sub-micron positioning, vibration isolation, and optics.


Our primary served markets include semiconductor capital equipment, general industrial, life sciences, and research.


Newport Spectra-Physics GmbH

Guerickeweg 7

64291 Darmstadt



Phone: +49 6151 708-0

Fax: +49 6151 708-217


Websites: | |


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