MKS Instruments

Newport Spectra-Physics GmbH

 

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor, and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.

 

Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control technology, ozone generation and delivery, RF & DC power, reactive gas generation, vacuum technology, lasers, photonics, sub-micron positioning, vibration isolation, and optics.

 

Our primary served markets include semiconductor capital equipment, general industrial, life sciences, and research.

Contact

Newport Spectra-Physics GmbH

Guerickeweg 7

64291 Darmstadt

Germany

 

Phone: +49 6151 708 0

Fax: +49 089 424106

E-mail: mks-germany@mksinst.com

Website: www.mksinst.com

 


Bayerisches Laserzentrum GmbH

Konrad-Zuse-Straße 2-6

91052 Erlangen, Germany

 

Phone: +49 (0)9131-977900

Fax: +49 (0)9131-9779011

E-Mail: info@blz.org

Institute of Photonic Technologies

Konrad-Zuse-Straße 3/5

91052 Erlangen, Germany

 

Phone: +49 (0)9131-8523241

Fax: +49 (0)9131-8523234

E-Mail: info@lpt.uni-erlangen.de

LANE-TEAM

Konrad-Zuse-Straße 2-6

91052 Erlangen, Germany

 

Phone 1: +49 (0)151-22253029

(Markus Döring)

Phone 2: +49 (0)9131-9779023

(Dr. Hans-Joachim Krauß)

E-Mail: info@lane-conference.org

 


 

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