Newport Spectra-Physics GmbH
MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor, and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity.
Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control technology, ozone generation and delivery, RF & DC power, reactive gas generation, vacuum technology, lasers, photonics, sub-micron positioning, vibration isolation, and optics.
Our primary served markets include semiconductor capital equipment, general industrial, life sciences, and research.
Contact
Newport Spectra-Physics GmbH
Guerickeweg 7
64291 Darmstadt
Germany
Phone: +49 6151 708 0
Fax: +49 089 424106
E-mail: mks-germany@mksinst.com
Website: www.mksinst.com
Konrad-Zuse-Straße 2-6
91052 Erlangen, Germany
Phone: +49 (0)9131-977900
Fax: +49 (0)9131-9779011
E-Mail: info@blz.org
Institute of Photonic Technologies
Konrad-Zuse-Straße 3/5
91052 Erlangen, Germany
Phone: +49 (0)9131-8523241
Fax: +49 (0)9131-8523234
E-Mail: info@lpt.uni-erlangen.de
Konrad-Zuse-Straße 2-6
91052 Erlangen, Germany
Phone 1: +49 (0)9131-8523242
(Benjamin Lengenfelder)
Phone 2: +49 (0)9131-9779038
(Katrin Meyerhöfer)
Phone 3: +49 (0)9131-9779023
(Dr. Hans-Joachim Krauß)
E-Mail: info@lane-conference.org